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Inventors

Guenter Gerstmeier Frank Richter Valentin Rosskopf

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor QIMONDA AG, Assignor

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METHOD FOR EXAMINING STRUCTURES ON A WAFER

09/935,353 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Aug. 22, 2001

Examiner CHRISTOPHER G YOUNG

Class 430

Art Group 1756

Patent No. 6,656,647

Case Type Utility - 430/030000

Status Patented Case

Child 100 43 350.2

Last Updated: 6 years, 1 month ago

Date	#	Transaction
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METHOD FOR EXAMINING STRUCTURES ON A WAFER

09/935,353 | U.S. Patent Application

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