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WAFER CLEANING APPARATUS

09/950,437 | U.S. Patent Application

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Location ELECTRONIC
Filed Sept. 10, 2001
Examiner TERRENCE R TILL
Class 015
Art Group 1744
Patent No. 6,739,013
Case Type Utility - 015/102000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child 00119660.9
Last Updated: 5 years, 7 months ago
Date # Transaction