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METHOD FOR DEPOSITING A TWO-LAYER DIFFUSION BARRIER

09/992,977 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Nov. 19, 2001
Examiner IDA M SOWARD
Class 438
Art Group 2822
Patent No. 6,579,786
Case Type Utility - 438/618000
Status Patented Case
Parent PCT/DE00/01580 -
Child 199 22 557.5
Last Updated: 5 years, 7 months ago
Date # Transaction