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SILICON GENESIS CORPORATION

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FRANCOIS J. HENLEY NATHAN CHEUNG

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PLANARIZING TECHNIQUE FOR MULTILAYERED SUBSTRATES

09/89,931 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed June 3, 1998

Examiner SAVITRI MULPURI

Class 438

Art Group 2812

Patent No. 6,103,599

Case Type Utility - 438/459000

Status Patented Case

Parent 60/53,770 Expired

Child 09/519,718 Abandoned

Child 09/588,805 Abandoned

Last Updated: 1 year, 2 months ago

Date	#	Transaction
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PLANARIZING TECHNIQUE FOR MULTILAYERED SUBSTRATES

09/89,931 | U.S. Patent Application

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