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USE OF SILICON OXYNITRIDE ARC FOR METAL LAYERS

09/207,562 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Dec. 8, 1998
Examiner RENZO ROCCHEGIANI
Class 438
Art Group 2825
Patent No. 6,326,231
Case Type Utility - 438/597000
Status Patented Case
Last Updated: 10 months ago
Date # Transaction