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METHOD AND CONFIGURATION FOR CONDITIONING A POLISHING PAD SURFACE

10/114,773 | U.S. Patent Application

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Location ELECTRONIC
Filed April 2, 2002
Examiner DUNG NGUYEN, V
Class 451
Art Group 3723
Patent No. 7,097,535
Case Type Utility - 451/005000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child 01108300.3
Last Updated: 6 years, 2 months ago
Date # Transaction