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Inventors

Frank Adler Guido Angenendt

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor QIMONDA AG, Assignor

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METHOD FOR LOCAL ETCHING

10/12,163 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Oct. 26, 2001

Examiner WILLIAM A POWELL

Class 438

Art Group 1765

Patent No. 6,683,009

Case Type Utility - 438/748000

Status Patented Case

Child 100 53 198.9

Last Updated: 5 years, 5 months ago

Date	#	Transaction
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METHOD FOR LOCAL ETCHING

10/12,163 | U.S. Patent Application

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