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PLANT FOR PROCESSING WAFERS

10/134,125 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed April 29, 2002
Examiner KHOI H TRAN
Class 700
Art Group 3651
Patent No. 6,594,546
Case Type Utility - 700/213000
Status Patented Case
Parent PCT/DE00/03742 -
Child 199 52 194.8
Last Updated: 6 years, 5 months ago
Date # Transaction