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Inventor

Jurgen Elger

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor QIMONDA AG, Assignor

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PLANT FOR PROCESSING WAFERS

10/134,125 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed April 29, 2002

Examiner KHOI H TRAN

Class 700

Art Group 3651

Patent No. 6,594,546

Case Type Utility - 700/213000

Status Patented Case

Parent PCT/DE00/03742 -

Child 199 52 194.8

Last Updated: 5 years, 8 months ago

Date	#	Transaction
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10/134,125 | U.S. Patent Application

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