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HOLDER FOR SEMICONDUCTOR WAFERS IN A BRUSH-CLEANING INSTALLATION

10/134,893 | U.S. Patent Application

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Location ELECTRONIC
Filed April 29, 2002
Examiner ABRAHAM BAHTA
Class 015
Art Group 1775
Patent No. 6,804,851
Case Type Utility - 015/077000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child 101 21 010.8
Last Updated: 4 years, 11 months ago
Date # Transaction