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Inventors

Gunther Czech Ernst-christian Richter Ulrich Scheler Michael Sebald

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES, AG, Assignor QIMONDA AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor

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METHOD FOR EXPERIMENTALLY VERIFYING IMAGING ERRORS IN OPTICAL EXPOSURE UNITS

10/135,471 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed April 30, 2002

Examiner CHRISTOPHER G YOUNG

Class 430

Art Group 1756

Patent No. 6,696,208

Case Type Utility - 430/030000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child 101 21 179.1

Last Updated: 5 years, 9 months ago

Date	#	Transaction
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METHOD FOR EXPERIMENTALLY VERIFYING IMAGING ERRORS IN OPTICAL EXPOSURE UNITS

10/135,471 | U.S. Patent Application

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