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Click below for detailed party information:

Inventors

Gunther Czech Ernst-Christian Richter Ulrich Scheler Michael Sebald

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor QIMONDA AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor

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METHOD FOR EXPERIMENTALLY VERIFYING IMAGING ERRORS IN PHOTOMASKS

10/135,684 | U.S. Patent Application

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Location ELECTRONIC

Filed April 30, 2002

Examiner CHRISTOPHER G YOUNG

Class 430

Art Group 1756

Patent No. 6,800,407

Case Type Utility - 430/030000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child 101 21 178.3

Last Updated: 5 years, 3 months ago

Date	#	Transaction
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METHOD FOR EXPERIMENTALLY VERIFYING IMAGING ERRORS IN PHOTOMASKS

10/135,684 | U.S. Patent Application

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