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Inventor

Michael Goetzke

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor QIMONDA AG, Assignor

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INSTALLATION FOR PROCESSING WAFERS

10/14,245 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Nov. 7, 2001

Examiner TUAN N NGUYEN

Class 209

Art Group 3653

Patent No. 6,670,568

Case Type Utility - 209/559000

Status Patented Case

Parent PCT/DE00/01450 -

Child 199 21 243.0

Last Updated: 4 years, 11 months ago

Date	#	Transaction
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INSTALLATION FOR PROCESSING WAFERS

10/14,245 | U.S. Patent Application

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