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INSTALLATION FOR PROCESSING WAFERS

10/14,245 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Nov. 7, 2001
Examiner TUAN N NGUYEN
Class 209
Art Group 3653
Patent No. 6,670,568
Case Type Utility - 209/559000
Status Patented Case
Parent PCT/DE00/01450 -
Child 199 21 243.0
Last Updated: 5 years, 8 months ago
Date # Transaction