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ALTERNATING PHASE MASK

10/158,733 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed May 30, 2002
Examiner STEPHEN D ROSASCO
Class 430
Art Group 1756
Patent No. 6,660,437
Case Type Utility - 430/005000
Status Patented Case
Parent PCT/DE00/04136 -
Child 199 57 542.8
Last Updated: 5 years, 1 month ago
Date # Transaction