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Inventor

Martin Gutsche

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INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor QIMONDA AG, Assignor

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METHOD FOR FABRICATING A HARD MASK

10/164,549 | U.S. Patent Application

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Location ELECTRONIC

Filed June 7, 2002

Examiner DUNG ANH LE

Class 438

Art Group 2819

Patent No. 6,852,640

Case Type Utility - 438/719000

Status Patented Case

Parent PCT/DE00/04188 -

Child 199 58 904.6

Last Updated: 4 years, 11 months ago

Date	#	Transaction
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METHOD FOR FABRICATING A HARD MASK

10/164,549 | U.S. Patent Application

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