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Click below for detailed party information:

Inventors

Matthias Goldbach Thomas Hecht Bernhard Sell

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor QIMONDA AG, Assignor

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METHOD FOR PRODUCING AND/OR RENEWING AN ETCHING MASK

10/167,785 | U.S. Patent Application

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Location ELECTRONIC

Filed June 12, 2002

Examiner KATHLEEN DUDA

Class 430

Art Group 1756

Patent No. 6,806,037

Case Type Utility - 430/314000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child 101 28 481.0

Last Updated: 5 years, 6 months ago

Date	#	Transaction
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METHOD FOR PRODUCING AND/OR RENEWING AN ETCHING MASK

10/167,785 | U.S. Patent Application

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