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METHOD OF PRODUCING LARGE-AREA MEMBRANE MASKS BY DRY ETCHING

10/185,631 | U.S. Patent Application

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Location ELECTRONIC
Filed June 28, 2002
Examiner LYNETTE T UMEZ ERONINI
Class 438
Art Group 1765
Patent No. 6,864,182
Case Type Utility - 438/706000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child 101 31 139.7
Last Updated: 5 years, 9 months ago
Date # Transaction