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Click below for detailed party information:

Inventor

Jorg Rottstegge

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor QIMONDA AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor

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CHEMICAL CONSOLIDATION OF PHOTORESISTS IN THE UV RANGE

10/186,651 | U.S. Patent Application

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Location ELECTRONIC

Filed July 1, 2002

Examiner JOHN S RUGGLES

Class 430

Art Group 1756

Patent No. 7,067,234

Case Type Utility - 430/296000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child 101 31 488.4

Last Updated: 5 years, 9 months ago

Date	#	Transaction
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CHEMICAL CONSOLIDATION OF PHOTORESISTS IN THE UV RANGE

10/186,651 | U.S. Patent Application

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