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NEGATIVE RESIST PROCESS WITH SIMULTANEOUS DEVELOPMENT AND SILYLATION

10/186,660 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed July 1, 2002
Examiner KRIPA SAGAR
Class 430
Art Group 1756
Patent No. 6,770,423
Case Type Utility - 430/311000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child 101 31 667.4
Last Updated: 5 years, 9 months ago
Date # Transaction