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Click below for detailed party information:

Inventors

Wolfram Kostler Gunther Hraschan

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES SC300 GMBH & CO. KG, Assignor QIMONDA AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor

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WAFER HANDLING SYSTEM AND WAFER HANDLING METHOD

10/186,970 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed July 1, 2002

Examiner DOUGLAS A HESS

Class 414

Art Group 3651

Patent No. 6,767,170

Case Type Utility - 414/217000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child 01 115 947.2

Last Updated: 5 years ago

Date	#	Transaction
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WAFER HANDLING SYSTEM AND WAFER HANDLING METHOD

10/186,970 | U.S. Patent Application

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