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Click below for detailed party information:

Inventors

Thorsten Schedel Torsten Seidel

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES SC300 GMBH & CO. KG, Assignor QIMONDA AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor

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METHOD FOR ADJUSTING A TEMPERATURE IN A RESIST PROCESS

10/190,097 | U.S. Patent Application

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Location ELECTRONIC

Filed July 3, 2002

Examiner KATHLEEN DUDA

Class 430

Art Group 1756

Patent No. 6,806,008

Case Type Utility - 430/030000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child 01 116 132.0

Last Updated: 5 years, 6 months ago

Date	#	Transaction
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METHOD FOR ADJUSTING A TEMPERATURE IN A RESIST PROCESS

10/190,097 | U.S. Patent Application

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