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Inventors

Markus Kirchhoff Martin Schrems

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor QIMONDA AG, Assignor

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METHOD FOR FILLING TRENCHES IN INTEGRATED SEMICONDUCTOR CIRCUITS

10/210,374 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed July 31, 2002

Examiner GEORGE R FOURSON III

Class 438

Art Group 2823

Patent No. 6,677,218

Case Type Utility - 438/441000

Status Patented Case

Child 101 37 431.3

Child 101 47 894.1

Last Updated: 4 years, 11 months ago

Date	#	Transaction
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METHOD FOR FILLING TRENCHES IN INTEGRATED SEMICONDUCTOR CIRCUITS

10/210,374 | U.S. Patent Application

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