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METHOD FOR FILLING TRENCHES IN INTEGRATED SEMICONDUCTOR CIRCUITS

10/210,374 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed July 31, 2002
Examiner GEORGE R FOURSON III
Class 438
Art Group 2823
Patent No. 6,677,218
Case Type Utility - 438/441000
Status Patented Case
Child 101 37 431.3
Child 101 47 894.1
Last Updated: 5 years, 8 months ago
Date # Transaction