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Inventor

Kay Lederer

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor QIMONDA AG, Assignor

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PROCESS FOR STRUCTURING A PHOTORESIST LAYER ON A SEMICONDUCTOR SUBSTRATE

10/213,413 | U.S. Patent Application

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Location ELECTRONIC

Filed Aug. 5, 2002

Examiner KATHLEEN DUDA

Class 430

Art Group 1756

Patent No. 6,858,376

Case Type Utility - 430/311000

Status Patented Case

Child 101 38 103.4

Last Updated: 5 years, 6 months ago

Date	#	Transaction
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PROCESS FOR STRUCTURING A PHOTORESIST LAYER ON A SEMICONDUCTOR SUBSTRATE

10/213,413 | U.S. Patent Application

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