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PROCESS FOR PRODUCING CONTACT HOLES ON A METALLIZATION STRUCTURE

10/223,649 | U.S. Patent Application

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Location ELECTRONIC
Filed Aug. 19, 2002
Examiner DUNG ANH LE
Class 438
Art Group 2818
Patent No. 6,750,140
Case Type Utility - 438/637000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child 101 40 468.9
Last Updated: 5 years ago
Date # Transaction