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Inventors

Dirk Efferenn Ulrike Gruning Von Schwerin Hans-Peter Moll Jorg Radecker Andreas Wich-Glasen

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor QIMONDA AG, Assignor

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METHOD FOR FABRICATING A SELF-ALIGNING MASK

10/228,886 | U.S. Patent Application

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Location ELECTRONIC

Filed Aug. 27, 2002

Examiner THANHHA S PHAM

Class 438

Art Group 2813

Patent No. 7,125,778

Case Type Utility - 438/294000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child 101 41 841.8

Last Updated: 5 years, 8 months ago

Date	#	Transaction
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METHOD FOR FABRICATING A SELF-ALIGNING MASK

10/228,886 | U.S. Patent Application

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