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METHOD FOR PRODUCING A STRUCTURED LAYER ON A SEMICONDUCTOR SUBSTRATE

10/233,692 | U.S. Patent Application

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Location ELECTRONIC
Filed Sept. 3, 2002
Examiner KATHLEEN DUDA
Class 430
Art Group 1756
Patent No. 6,861,206
Case Type Utility - 430/313000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child 101 42 683.6
Last Updated: 4 years, 11 months ago
Date # Transaction