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Inventors

Matthias Forster Kristin Schupke Anja Morgenschweis Anett Moll Jens-Uwe Sachse

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor QIMONDA AG, Assignor

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METHOD FOR FABRICATING A TRENCH CAPACITOR FOR A SEMICONDUCTOR MEMORY

10/234,547 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Sept. 4, 2002

Examiner KHANH B DUONG

Class 438

Art Group 2822

Patent No. 6,734,077

Case Type Utility - 438/386000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child 101 43 283.6

Last Updated: 5 years, 8 months ago

Date	#	Transaction
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METHOD FOR FABRICATING A TRENCH CAPACITOR FOR A SEMICONDUCTOR MEMORY

10/234,547 | U.S. Patent Application

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