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METHOD OF FABRICATING A MICROSTRUCTURE AND PHOTOLITHOGRAPHY TRIMMING MASK

10/262,117 | U.S. Patent Application

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Location ELECTRONIC
Filed Oct. 1, 2002
Examiner SALEHA R MOHAMEDULLA
Class 430
Art Group 1756
Patent No. 6,794,095
Case Type Utility - 430/005000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child 101 49 304.5
Last Updated: 5 years, 6 months ago
Date # Transaction