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Inventors

Jens Bachmann Ulrich Baier Falko Hohnsdorf

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor INFINEON TECHNOLOGIES AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor QIMONDA AG, Assignor

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PROCESS FOR ETCHING A METAL LAYER SYSTEM

10/267,335 | U.S. Patent Application

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Location ELECTRONIC

Filed Oct. 9, 2002

Examiner GEORGE A GOUDREAU

Class 438

Art Group 1763

Patent No. 6,869,886

Case Type Utility - 438/750000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child 101 49 736.9

Last Updated: 5 years, 6 months ago

Date	#	Transaction
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PROCESS FOR ETCHING A METAL LAYER SYSTEM

10/267,335 | U.S. Patent Application

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