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DEFECT-MINIMIZING, TOPOLOGY-INDEPENDENT PLANARIZATION OF PROCESS SURFACES IN SEMICONDUCTOR DEVICES

10/268,148 | U.S. Patent Application

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Location ELECTRONIC
Filed Oct. 10, 2002
Examiner CHRISTIAN D WILSON
Class 438
Art Group 2824
Patent No. 6,893,968
Case Type Utility - 438/697000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child 101 49 916.7
Last Updated: 5 years, 2 months ago
Date # Transaction