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PROCESS FOR SILYLATING PHOTORESISTS IN THE UV RANGE

10/285,050 | U.S. Patent Application

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Location ELECTRONIC
Filed Oct. 31, 2002
Examiner JOHN S RUGGLES
Class 430
Art Group 1756
Patent No. 7,045,273
Case Type Utility - 430/296000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child 101 53 497.3
Last Updated: 5 years, 5 months ago
Date # Transaction