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Inventors

Jens Ferbitz Werner Mormann Jorg Rottstegge Christoph Hohle Christian Eschbaumer Michael Sebald

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor INFINEON TECHNOLOGIES AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor QIMONDA AG, Assignor

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PROCESS FOR SILYLATING PHOTORESISTS IN THE UV RANGE

10/285,050 | U.S. Patent Application

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Location ELECTRONIC

Filed Oct. 31, 2002

Examiner JOHN S RUGGLES

Class 430

Art Group 1756

Patent No. 7,045,273

Case Type Utility - 430/296000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child 101 53 497.3

Last Updated: 6 years, 2 months ago

Date	#	Transaction
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PROCESS FOR SILYLATING PHOTORESISTS IN THE UV RANGE

10/285,050 | U.S. Patent Application

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