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Inventors

Manfred Engelhardt Walter Hartner Frank Hintermaier Gunther Schindler Volker Weinrich

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor QIMONDA AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor

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METHOD OF PATTERNING FERROELECTRIC LAYERS

10/364,819 | U.S. Patent Application

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Location ELECTRONIC

Filed Feb. 11, 2003

Examiner QUOC DINH HOANG

Class 438

Art Group 2818

Patent No. 6,730,562

Case Type Utility - 438/253000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Parent PCT/EP01/09131 -

Child 100 39 411.6

Last Updated: 5 years, 2 months ago

Date	#	Transaction
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METHOD OF PATTERNING FERROELECTRIC LAYERS

10/364,819 | U.S. Patent Application

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