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METHOD FOR WAFER POSITION DATA RETRIEVAL IN SEMICONDUCTOR WAFER MANUFACTURING

10/368,073 | U.S. Patent Application

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Location ELECTRONIC
Filed Feb. 18, 2003
Examiner DOUGLAS S LEE
Class 700
Art Group 2125
Patent No. 6,909,932
Case Type Utility - 700/116000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent PCT/EP01/08900 -
Child 00117733.6
Last Updated: 5 years, 3 months ago
Date # Transaction