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Inventors

Dirk Efferenn Hans-Peter Moll

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor QIMONDA AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor

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METHOD FOR FILLING DEPRESSIONS ON A SEMICONDUCTOR WAFER

10/378,244 | U.S. Patent Application

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Location ELECTRONIC

Filed March 3, 2003

Examiner GEORGE R FOURSON III

Class 438

Art Group 2823

Patent No. 6,716,720

Case Type Utility - 438/424000

Status Patented Case

Child 102 09 334.2

Last Updated: 5 years, 9 months ago

Date	#	Transaction
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METHOD FOR FILLING DEPRESSIONS ON A SEMICONDUCTOR WAFER

10/378,244 | U.S. Patent Application

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