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METHOD FOR EXPOSING A SEMICONDUCTOR WAFER

10/435,449 | U.S. Patent Application

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Location ELECTRONIC
Filed May 9, 2003
Examiner GEORGE A GOUDREAU
Class 438
Art Group 1763
Patent No. 6,887,722
Case Type Utility - 438/709000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent PCT/EP01/12237 -
Child 00124564.6
Last Updated: 6 years, 3 months ago
Date # Transaction