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Inventors

Thorsten Schedel Torsten Seidel

Assignee

INFINEON TECHNOLOGIES AG

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INFNEON TECHNOLLOGIES SC300 GMBH & CO. KG, Assignor INFINEON TECHNOLOGIES SC300 GMBH & CO. KG, Assignor QIMONDA AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor

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METHOD FOR EXPOSING A SEMICONDUCTOR WAFER

10/435,449 | U.S. Patent Application

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Location ELECTRONIC

Filed May 9, 2003

Examiner GEORGE A GOUDREAU

Class 438

Art Group 1763

Patent No. 6,887,722

Case Type Utility - 438/709000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Parent PCT/EP01/12237 -

Child 00124564.6

Last Updated: 5 years, 6 months ago

Date	#	Transaction
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METHOD FOR EXPOSING A SEMICONDUCTOR WAFER

10/435,449 | U.S. Patent Application

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