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PVD METHOD AND PVD APPARATUS

10/620,570 | U.S. Patent Application

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Location ELECTRONIC
Filed July 16, 2003
Examiner STEVEN H VERSTEEG
Class 204
Art Group 1753
Patent No. 7,022,209
Case Type Utility - 204/192120
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child 102 32 179.5
Last Updated: 5 years, 6 months ago
Date # Transaction