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METHOD FOR PRODUCING FERROELECTRIC CAPACITORS AND INTEGRATED SEMICONDUCTOR MEMORY CHIPS

10/638,594 | U.S. Patent Application

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Location ELECTRONIC
Filed Aug. 11, 2003
Examiner NATHAN W HA
Class 438
Art Group 2814
Patent No. 6,875,652
Case Type Utility - 438/238000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent PCT/DE01/04790 -
Child 101 05 997.3
Last Updated: 5 years, 9 months ago
Date # Transaction