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Inventors

Martin Rossiger Thorsten Schedel Jens Stacker

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor POLARIS INNOVATIONS LIMITED, Assignor QIMONDA AG, Assignor

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METHOD FOR ALIGNING AND EXPOSING A SEMICONDUCTOR WAFER

10/686,848 | U.S. Patent Application

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Location ELECTRONIC

Filed Oct. 16, 2003

Examiner HOA B TRINH

Class 438

Art Group 2814

Patent No. 6,861,331

Case Type Utility - 438/401000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Child 102 48 224.1

Last Updated: 5 years, 1 month ago

Date	#	Transaction
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METHOD FOR ALIGNING AND EXPOSING A SEMICONDUCTOR WAFER

10/686,848 | U.S. Patent Application

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