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Inventors

Matthias Lehr Gregoire Grandremy

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor QIMONDA AG, Assignor

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METHOD FOR PATTERNING AN ORGANIC ANTIREFLECTION LAYER

10/73,554 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Feb. 11, 2002

Examiner HOA B TRINH

Class 438

Art Group 2814

Patent No. 6,559,067

Case Type Utility - 438/763000

Status Patented Case

Parent PCT/EP00/07781 -

Child 199 37 995.5

Last Updated: 5 years, 8 months ago

Date	#	Transaction
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METHOD FOR PATTERNING AN ORGANIC ANTIREFLECTION LAYER

10/73,554 | U.S. Patent Application

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