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Inventors

Josef Mathuni Jurgen Knobloch Christoph Nolscher

Assignee

INFINEON TECHNOLOGIES AG

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INFINEON TECHNOLOGIES AG, Assignor QIMONDA AG, Assignor POLARIS INNOVATIONS LIMITED, Assignor

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METHOD FOR PRODUCING AN ALTERNATING PHASE MASK

10/75,540 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)

Filed Feb. 14, 2002

Examiner QUOC DINH HOANG

Class 438

Art Group 2818

Patent No. 6,569,772

Case Type Utility - 438/701000

Status Patented Case

Child 101 06 819.0

Last Updated: 5 years, 1 month ago

Date	#	Transaction
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METHOD FOR PRODUCING AN ALTERNATING PHASE MASK

10/75,540 | U.S. Patent Application

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