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Inventors

Sven Lindfors Pekka Juha Soininen

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ASM IP HOLDING B.V.

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ASM INTERNATIONAL N.V., Assignor

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SHOWERHEAD ASSEMBLY AND ALD METHODS

10/782,727 | U.S. Patent Application

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Location ELECTRONIC

Filed Feb. 18, 2004

Examiner RUDY ZERVIGON

Class 118

Art Group 1792

Patent No. 7,601,223

Case Type Utility - 118/715000

Status Patented Case

Parent 10/428,207 Patented

Last Updated: 6 years, 1 month ago

Date	#	Transaction
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SHOWERHEAD ASSEMBLY AND ALD METHODS

10/782,727 | U.S. Patent Application

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