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Low-permittivity porous siliceous film, semiconductor devices having such films, and coating composition for forming the film

10/9,735 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed Dec. 17, 2001
Examiner STEPHEN J STEIN
Class 428
Art Group 1775
Case Type Utility - 428/446000
Status Abandoned -- Failure to Respond to an Office Action
Parent PCT/JP00/04021 -
Child 10/370,588 Patented
Child 11-199282
Last Updated: 4 years, 6 months ago
Date # Transaction