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ELECTROSTATIC CONTROL OF MICRO-OPTICAL COMPONENTS

10/81,496 | U.S. Patent Application

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Location ELECTRONIC
Filed Feb. 20, 2002
Examiner DANA FARAHANI
Class 257
Art Group 2814
Patent No. 6,838,738
Case Type Utility - 257/414000
Status Patented Case
Parent 60/324,245 Expired
Last Updated: 4 years, 9 months ago
Date # Transaction