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LOW K DIELECTRIC MATERIALS WITH INHERENT COPPER ION MIGRATION BARRIER

10/137,009 | U.S. Patent Application

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Location FILE REPOSITORY (FRANCONIA)
Filed May 1, 2002
Examiner HUNG K VU
Class 438
Art Group 2811
Patent No. 6,730,618
Case Type Utility - 438/780000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 09/371,340 Patented
Last Updated: 6 years, 5 months ago
Date # Transaction