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Inventors

Shuichi Kanno Hisao Yamashita Tomohiko Miyamoto Shin Tamata Yoshiki Shibano Takeo Komuro Tsugihiro Yukitake Terufumi Kawasaki

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APPARATUS FOR TREATING PERFLUOROCOMPOUND GAS

10/137,449 | U.S. Patent Application

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Location ELECTRONIC

Filed May 3, 2002

Examiner THANH P DUONG

Class 422

Art Group 1764

Patent No. 7,285,250

Case Type Utility - 422/177000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Parent 09/651,783 Abandoned

Child 11-335468

Last Updated: 4 years, 9 months ago

Date	#	Transaction
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APPARATUS FOR TREATING PERFLUOROCOMPOUND GAS

10/137,449 | U.S. Patent Application

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