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APPARATUS FOR TREATING PERFLUOROCOMPOUND GAS

10/137,449 | U.S. Patent Application

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Location ELECTRONIC
Filed May 3, 2002
Examiner THANH P DUONG
Class 422
Art Group 1764
Patent No. 7,285,250
Case Type Utility - 422/177000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 09/651,783 Abandoned
Child 11-335468
Last Updated: 6 years, 5 months ago
Date # Transaction