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Inventors

Aelan Mosden Sandra Hyland Minori Kajimoto

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TOKYO ELECTRON LIMITED

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METHOD OF ETCHING HIGH ASPECT RATIO FEATURES

10/492,541 | U.S. Patent Application

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Location ELECTRONIC

Filed June 29, 2004

Examiner LAN VINH

Class 438

Art Group 1765

Patent No. 7,226,868

Case Type Utility - 438/710000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Parent PCT/US02/31607 Published

Parent 60/330,788 Expired

Last Updated: 4 years, 1 month ago

Date	#	Transaction
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METHOD OF ETCHING HIGH ASPECT RATIO FEATURES

10/492,541 | U.S. Patent Application

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