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Hui-Chuan Hung

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TAIWAN SEMICONDUCTOR MANUFACTURING CO. LTD.

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IN-SITU ELECTRON BEAM INDUCED CURRENT DETECTION

10/656,754 | U.S. Patent Application

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Location ELECTRONIC

Filed Sept. 6, 2003

Examiner EMILY Y CHAN

Class 324

Art Group 2829

Patent No. 6,897,665

Case Type Utility - 324/751000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Last Updated: 6 years, 8 months ago

Date	#	Transaction
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IN-SITU ELECTRON BEAM INDUCED CURRENT DETECTION

10/656,754 | U.S. Patent Application

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