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Steven W. Bedell Guy M. Cohen Huajie Chen

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INTERNATIONAL BUSINESS MACHINES CORPORATION

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METHOD OF FABRICATING STRAINED SI SOI WAFERS

10/728,519 | U.S. Patent Application

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Location ELECTRONIC

Filed Dec. 5, 2003

Examiner PHUC T DANG

Class 438

Art Group 2818

Patent No. 6,972,247

Case Type Utility - 438/517000

Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362

Last Updated: 4 years, 4 months ago

Date	#	Transaction
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METHOD OF FABRICATING STRAINED SI SOI WAFERS

10/728,519 | U.S. Patent Application

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