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CHEMICAL MECHANICAL POLISHING PROCESS

11/134,586 | U.S. Patent Application

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Location ELECTRONIC
Filed May 20, 2005
Examiner TIMOTHY ELEY, V
Class 451
Art Group 3724
Patent No. 7,270,596
Case Type Utility - 451/036000
Status Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Parent 09/717,477 Patented
Parent 09/389,536 Patented
Last Updated: 6 years ago
Date # Transaction