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Yasuhiro Omura

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NIKON CORPORATION

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PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD

11/266,288 | U.S. Patent Application

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Location ELECTRONIC

Filed Nov. 4, 2005

Examiner ZIA R HASHMI

Class 250

Art Group 2881

Patent No. 7,348,575

Case Type Utility - 250/492200

Status Patented Case

Parent PCT/JP04/06417 -

Parent 60/721,582 Expired

Child 11/513,160 Patented

Child 11/583,934 Patented

Child 11/583,916 Patented

Child 11/882,208 Abandoned

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Last Updated: 4 years, 6 months ago

Date	#	Transaction
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PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD

11/266,288 | U.S. Patent Application

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