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METHOD OF ENHANCING AN ETCH SYSTEM

11/365,047 | U.S. Patent Application

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Location ELECTRONIC
Filed Feb. 28, 2006
Examiner ALONZO CHAMBLISS
Class 438
Art Group 2892
Patent No. 7,838,322
Case Type Utility - 438/053000
Status Patented Case
Parent 11/361,608 Patented
Parent 60/657,261 Expired
Child 11/491,742 Abandoned
Last Updated: 5 years, 12 months ago
Date # Transaction